Epitaxial wafers for sensor manufacturing

Okmetic’s extensive substrate manufacturing knowledge combined with highly customized epitaxial layers forms a complete solution that is optimized for MEMS manufacturing from the first steps of crystal growing to value-added further processing.

Our epitaxial wafers have excellent layer uniformity and a sharp interface as well as first-rate purity and surface quality. For our customer this means efficient and easy-to-control MEMS manufacturing processes, high-end products and a possibility to realize new kinds of design and processing ideas.

Okmetic’s epitaxial wafers for sensor manufacturing include:

• epitaxy on a double side polished substrate for electrochemical etch stop processes 
• heavily-doped epitaxial wafers, including stress-free Ge co-doped wafers for P++ etch stop processes